Sensors 2004, 4(10), 156-162; doi:10.3390/s41000156
Article

Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation

1,2, 2,3, 3, 4, 2 and 1,2,* email
Received: 1 August 2004; Accepted: 6 September 2004 / Published: 30 October 2004
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Chalcogenide glasses offer an excellent “challenge” for their use and implementation in sensor arrays due to their good sensor-specific advantages in comparison to their crystalline counterparts. This paper will give an introduction on the preparation of chalcogenide glasses in the thin-film state. First, single microsensors have been prepared with the methods of semiconductor technology. In a next step, three microsensors are implemented onto one single silicon substrate to an “one chip” sensor array. Different ionselective chalcogenide glass membranes (PbSAgIAs2S3, CdSAgIAs2S3, CuAgAsSeTe and TlAgAsIS) were prepared by means of the pulsed laser deposition (PLD) process. The different sensor membranes and structures have been physically characterized by means of Rutherford backscattering spectrometry, scanning electron microscopy and video microscopy. The electrochemical behavior has been investigated by potentiometric measurements.
Keywords: heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry
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MDPI and ACS Style

Kloock, J.P.; Mourzina, Y.G.; Ermolenko, Y.; Doll, T.; Schuberth, J.; Schöning, M.J. Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation. Sensors 2004, 4, 156-162.

AMA Style

Kloock JP, Mourzina YG, Ermolenko Y, Doll T, Schuberth J, Schöning MJ. Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation. Sensors. 2004; 4(10):156-162.

Chicago/Turabian Style

Kloock, Joachim P.; Mourzina, Youlia G.; Ermolenko, Yuri; Doll, Theodor; Schuberth, Jürgen; Schöning, Michael J. 2004. "Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation." Sensors 4, no. 10: 156-162.

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