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Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation
University of Applied Sciences Aachen (Division Jülich), Laboratory for Chemical Sensors and Biosensors, 52428 Jülich, Germany
Research Centre Jülich, Institute of Thin Films and Interfaces, 52425 Jülich, Germany
St. Petersburg State University, Department of Chemistry, 199034 St. Petersburg, Russia
Institute of Microtechnology Mainz, 55129 Mainz, Germany
* Author to whom correspondence should be addressed.
Received: 1 August 2004; Accepted: 6 September 2004 / Published: 30 October 2004
Abstract: Chalcogenide glasses offer an excellent “challenge” for their use and implementation in sensor arrays due to their good sensor-specific advantages in comparison to their crystalline counterparts. This paper will give an introduction on the preparation of chalcogenide glasses in the thin-film state. First, single microsensors have been prepared with the methods of semiconductor technology. In a next step, three microsensors are implemented onto one single silicon substrate to an “one chip” sensor array. Different ionselective chalcogenide glass membranes (PbSAgIAs2S3, CdSAgIAs2S3, CuAgAsSeTe and TlAgAsIS) were prepared by means of the pulsed laser deposition (PLD) process. The different sensor membranes and structures have been physically characterized by means of Rutherford backscattering spectrometry, scanning electron microscopy and video microscopy. The electrochemical behavior has been investigated by potentiometric measurements.
Keywords: heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry
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Kloock, J.P.; Mourzina, Y.G.; Ermolenko, Y.; Doll, T.; Schuberth, J.; Schöning, M.J. Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation. Sensors 2004, 4, 156-162.
Kloock JP, Mourzina YG, Ermolenko Y, Doll T, Schuberth J, Schöning MJ. Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation. Sensors. 2004; 4(10):156-162.
Kloock, Joachim P.; Mourzina, Youlia G.; Ermolenko, Yuri; Doll, Theodor; Schuberth, Jürgen; Schöning, Michael J. 2004. "Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation." Sensors 4, no. 10: 156-162.