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Sensors 2002, 2(9), 356-365; doi:10.3390/s20900356
Article

A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

1,2, 1,3, 1 and 1,2,*
Received: 19 August 2002 / Accepted: 1 September 2002 / Published: 16 September 2002
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Abstract

A first step towards a microfabricated potentiometric thin-film sensor array for the simultaneous detection of Pb2+, Cd2+ and Cu2+ has been realized. The sensitive layers used are on the basis of chalcogenide glass materials. These thin-film chalcogenide glass materials that consist of mixtures of Pb-Ag-As-I-S, Cd-Ag-As-I-S or Cu-Ag-As-Se have been prepared by pulsed laser deposition technique. The developed sensor array has been physically characterized by means of scanning electron microscopy and Rutherford backscattering spectrometry. The electrochemical sensor characterization has been performend by potentiometric measurements.
Keywords: heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Kloock, J.P.; Mourzina, Y.G.; Schubert, J.; Schöning, M.J. A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials. Sensors 2002, 2, 356-365.

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