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Sensors 2002, 2(9), 356-365; doi:10.3390/s20900356

A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials

1
Department of Applied Physics, University of Applied Sciences Aachen, Ginsterweg 1, 52428 Jülich, Germany
2
Institute for Thin Films and Interfaces, Research Centre Jülich GmbH, 52425 Jülich, Germany
3
Department of Chemistry, St. Petersburg State University, Universitetskaya nab. 7/9, St. Petersburg 199034, Russia
*
Author to whom correspondence should be addressed.
Received: 19 August 2002 / Accepted: 1 September 2002 / Published: 16 September 2002
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Abstract

A first step towards a microfabricated potentiometric thin-film sensor array for the simultaneous detection of Pb2+, Cd2+ and Cu2+ has been realized. The sensitive layers used are on the basis of chalcogenide glass materials. These thin-film chalcogenide glass materials that consist of mixtures of Pb-Ag-As-I-S, Cd-Ag-As-I-S or Cu-Ag-As-Se have been prepared by pulsed laser deposition technique. The developed sensor array has been physically characterized by means of scanning electron microscopy and Rutherford backscattering spectrometry. The electrochemical sensor characterization has been performend by potentiometric measurements.
Keywords: heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry heavy metal detection; thin-film sensor array; chalcogenide glass material; microfabrication technique; pulsed laser deposition; potentiometry
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Kloock, J.P.; Mourzina, Y.G.; Schubert, J.; Schöning, M.J. A First Step Towards a Microfabricated Thin-Film Sensor Array on the Basis of Chalcogenide Glass Materials. Sensors 2002, 2, 356-365.

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