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A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite
Microelectronics and Semiconductor Research Group, ECE Department, National Technological Park, University of Limerick, Limerick, Ireland
* Author to whom correspondence should be addressed.
Received: 6 February 2002 / Accepted: 8 February 2002 / Published: 22 February 2002
Abstract: A ceramic thick film humidity sensor, produced from MnZn ferrite, is presented. The proposed sensing mechanism is a combination of proton hopping, hydronium diffusion, and vacancy donor traps releasing electrons into the conduction band. The sensor structure comprises a two-layer device; the first layer is an interdigitated conductor and the second layer is a 30μm thick sensing layer. The effects of sintering the sensing pastes in air and vacuum have been reported. The air-fired sample exhibits the highest humidity sensitivity (1.54%/RH%) and the lowest temperature sensitivity (0.37%/oC). The vacuum-fired sample has the lowest humidity sensitivity (0.043%/RH) and the highest temperature sensitivity (0.77%/oC). The sensitivity results indicate that the air-fired sample has the best potential for use in humidity sensing applications.
Keywords: Ceramic; Thick film; Sensor; Temperature and humidity sensitivity
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MDPI and ACS Style
Arshaka, K.; Twomey, K.; Egan, D. A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite. Sensors 2002, 2, 50-61.
Arshaka K, Twomey K, Egan D. A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite. Sensors. 2002; 2(2):50-61.
Arshaka, K.; Twomey, K.; Egan, D. 2002. "A Ceramic Thick Film Humidity Sensor Based on MnZn Ferrite." Sensors 2, no. 2: 50-61.