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Sensors 2018, 18(2), 362; doi:10.3390/s18020362

A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates

Mechanical Engineering Institute, Yanshan University, Qinhuangdao 066004, China
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Author to whom correspondence should be addressed.
Received: 26 December 2017 / Revised: 20 January 2018 / Accepted: 25 January 2018 / Published: 26 January 2018
(This article belongs to the Collection Gas Sensors)
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Abstract

In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively. View Full-Text
Keywords: nanometer clearance; micro-resonant sensor; gas sensor nanometer clearance; micro-resonant sensor; gas sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Fu, X.; Xu, L. A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates. Sensors 2018, 18, 362.

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