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Sensors 2018, 18(2), 343; https://doi.org/10.3390/s18020343

Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons

1
State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China
2
China Marine Development and Research Center (CMDRC), Beijing 100049, China
*
Authors to whom correspondence should be addressed.
Received: 27 December 2017 / Revised: 14 January 2018 / Accepted: 14 January 2018 / Published: 25 January 2018
(This article belongs to the Section Chemical Sensors)
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Abstract

In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future. View Full-Text
Keywords: freons detection; bulk acoustic wave resonator; field effect transistor; dual-mode sensing; gas sensor freons detection; bulk acoustic wave resonator; field effect transistor; dual-mode sensing; gas sensor
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Chang, Y.; Hui, Z.; Wang, X.; Qu, H.; Pang, W.; Duan, X. Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons. Sensors 2018, 18, 343.

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