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Sensors 2017, 17(9), 1975; doi:10.3390/s17091975

A T-Type Capacitive Sensor Capable of Measuring5-DOF Error Motions of Precision Spindles

Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province, College of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China
School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
Author to whom correspondence should be addressed.
Received: 12 July 2017 / Revised: 15 August 2017 / Accepted: 23 August 2017 / Published: 28 August 2017
(This article belongs to the Section Physical Sensors)


The precision spindle is a core component of high-precision machine tools, and the accurate measurement of its error motions is important for improving its rotation accuracy as well as the work performance of the machine. This paper presents a T-type capacitive sensor (T-type CS) with an integrated structure. The proposed sensor can measure the 5-degree-of-freedom (5-DOF) error motions of a spindle in-situ and simultaneously by integrating electrode groups in the cylindrical bore of the stator and the outer end face of its flange, respectively. Simulation analysis and experimental results show that the sensing electrode groups with differential measurement configuration have near-linear output for the different types of rotor displacements. What’s more, the additional capacitance generated by fringe effects has been reduced about 90% with the sensing electrode groups fabricated based on flexible printed circuit board (FPCB) and related processing technologies. The improved signal processing circuit has also been increased one times in the measuring performance and makes the measured differential output capacitance up to 93% of the theoretical values. View Full-Text
Keywords: precision spindle; error motion measurement; capacitive sensor; integrated structure precision spindle; error motion measurement; capacitive sensor; integrated structure

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Xiang, K.; Wang, W.; Qiu, R.; Mei, D.; Chen, Z. A T-Type Capacitive Sensor Capable of Measuring5-DOF Error Motions of Precision Spindles. Sensors 2017, 17, 1975.

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