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Sensors 2017, 17(7), 1507; doi:10.3390/s17071507

Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators

State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China
The authors contributed equally to this work.
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Author to whom correspondence should be addressed.
Received: 4 April 2017 / Revised: 9 June 2017 / Accepted: 14 June 2017 / Published: 26 June 2017
(This article belongs to the Special Issue Acoustic Wave Resonator-Based Sensors)
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Abstract

This paper demonstrates a novel micro-size (120 μm × 200 μm) piezoelectric gas sensor based on a piezotransduced single-crystal silicon bulk acoustic resonator (PSBAR). The PSBARs operate at 102 MHz and possess high Q values (about 2000), ensuring the stability of the measurement. A corresponding gas sensor array is fabricated by integrating three different self-assembled monolayers (SAMs) modified PSBARs. The limit of detection (LOD) for ethanol vapor is demonstrated to be as low as 25 ppm with a sensitivity of about 1.5 Hz/ppm. Two sets of identification code bars based on the sensitivities and the adsorption energy constants are utilized to successfully discriminate isopropanol (IPA), ethanol, hexane and heptane vapors at low and high gas partial pressures, respectively. The proposed sensor array shows the potential to form a portable electronic nose system for volatile organic compound (VOC) differentiation. View Full-Text
Keywords: e-nose system; piezotransduced single-crystal silicon bulk acoustic resonators; gas sensing; MEMS e-nose system; piezotransduced single-crystal silicon bulk acoustic resonators; gas sensing; MEMS
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhao, Y.; Yang, Q.; Chang, Y.; Pang, W.; Zhang, H.; Duan, X. Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators. Sensors 2017, 17, 1507.

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