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Sensors 2017, 17(6), 1381; doi:10.3390/s17061381

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Science, Beijing 100190, China
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Author to whom correspondence should be addressed.
Academic Editor: Mustafa Yavuz
Received: 10 March 2017 / Revised: 17 May 2017 / Accepted: 8 June 2017 / Published: 14 June 2017
(This article belongs to the Special Issue MEMS and Nano-Sensors)
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Abstract

A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counteraction of stress in the centre and edges. In order to further improve the sensitivity; a pMUT with partially-etched piezoelectric film was adopted. The receive and transmit sensitivities of the pMUT were analyzed in details. The receive sensitivity of pMUT with partially-etched ZnO film is 3.3 dB or 6.8 dB higher than those with a centric and whole electrode, respectively; and the amplitude of a partially-etched ZnO film pMUT under a certain voltage is 5.5 dB and 30 dB higher than those with centric and whole electrode separately. Two pMUT-based ZnO films were fabricated by micromachining technology and their receive and transmit sensitivities were tested. The ZnO films deposited by direct current (DC) magnetron sputtering exhibit a densely packed structure with columnar crystallites. The test results show that the structure of the square diaphragm with partially-etched piezoelectric layer can significantly improve the transducer sensitivity. The receive sensitivity and transmit sensitivity are −238.35 dB (ref. 1 V/μPa) and 150.42 dB (ref. 1 μPa/V); respectively. View Full-Text
Keywords: pMUT; centric electrode structure; ZnO film; partially-etched; sensitivity pMUT; centric electrode structure; ZnO film; partially-etched; sensitivity
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Li, J.; Ren, W.; Fan, G.; Wang, C. Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film. Sensors 2017, 17, 1381.

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