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Sensors 2017, 17(6), 1194; doi:10.3390/s17061194

In-Process Atomic-Force Microscopy (AFM) Based Inspection

Mechanical Engineering Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
Academic Editor: Vittorio M. N. Passaro
Received: 23 March 2017 / Revised: 2 May 2017 / Accepted: 19 May 2017 / Published: 31 May 2017
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [8898 KB, uploaded 31 May 2017]   |  

Abstract

A new in-process atomic-force microscopy (AFM) based inspection is presented for nanolithography to compensate for any deviation such as instantaneous degradation of the lithography probe tip. Traditional method used the AFM probes for lithography work and retract to inspect the obtained feature but this practice degrades the probe tip shape and hence, affects the measurement quality. This paper suggests a second dedicated lithography probe that is positioned back-to-back to the AFM probe under two synchronized controllers to correct any deviation in the process compared to specifications. This method shows that the quality improvement of the nanomachining, in progress probe tip wear, and better understanding of nanomachining. The system is hosted in a recently developed nanomanipulator for educational and research purposes. View Full-Text
Keywords: in-process inspection; AFM; nanomachining; probes; nanoscale inspection in-process inspection; AFM; nanomachining; probes; nanoscale inspection
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Mekid, S. In-Process Atomic-Force Microscopy (AFM) Based Inspection. Sensors 2017, 17, 1194.

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