Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
AbstractWe experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Al-Ghamdi, M.S.; Alneamy, A.M.; Park, S.; Li, B.; Khater, M.E.; Abdel-Rahman, E.M.; Heppler, G.R.; Yavuz, M. Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator. Sensors 2017, 17, 1121.
Al-Ghamdi MS, Alneamy AM, Park S, Li B, Khater ME, Abdel-Rahman EM, Heppler GR, Yavuz M. Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator. Sensors. 2017; 17(5):1121.Chicago/Turabian Style
Al-Ghamdi, Majed S.; Alneamy, Ayman M.; Park, Sangtak; Li, Beichen; Khater, Mahmoud E.; Abdel-Rahman, Eihab M.; Heppler, Glenn R.; Yavuz, Mustafa. 2017. "Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator." Sensors 17, no. 5: 1121.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.