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Sensors 2017, 17(5), 1121; doi:10.3390/s17051121

Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

1
Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada
2
Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada
3
Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 15 March 2017 / Revised: 27 April 2017 / Accepted: 9 May 2017 / Published: 13 May 2017
(This article belongs to the Special Issue MEMS and Nano-Sensors)
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Abstract

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise. View Full-Text
Keywords: electrostatic MEMS; primary resonance; secondary resonances; parameter identification; process noise; measurement noise electrostatic MEMS; primary resonance; secondary resonances; parameter identification; process noise; measurement noise
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Al-Ghamdi, M.S.; Alneamy, A.M.; Park, S.; Li, B.; Khater, M.E.; Abdel-Rahman, E.M.; Heppler, G.R.; Yavuz, M. Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator. Sensors 2017, 17, 1121.

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