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Sensors 2017, 17(12), 2813; https://doi.org/10.3390/s17122813

Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor

Nanophotonics Technology Center (NTC), Universitat Politècnica de València, 46022 Valencia, Spain
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Received: 7 November 2017 / Revised: 25 November 2017 / Accepted: 28 November 2017 / Published: 5 December 2017
(This article belongs to the Special Issue Sensors for Health Monitoring and Disease Diagnosis)
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Abstract

Porous silicon seems to be an appropriate material platform for the development of high-sensitivity and low-cost optical sensors, as their porous nature increases the interaction with the target substances, and their fabrication process is very simple and inexpensive. In this paper, we present the experimental development of a porous silicon microcavity sensor and its use for real-time in-flow sensing application. A high-sensitivity configuration was designed and then fabricated, by electrochemically etching a silicon wafer. Refractive index sensing experiments were realized by flowing several dilutions with decreasing refractive indices, and measuring the spectral shift in real-time. The porous silicon microcavity sensor showed a very linear response over a wide refractive index range, with a sensitivity around 1000 nm/refractive index unit (RIU), which allowed us to directly detect refractive index variations in the 10−7 RIU range. View Full-Text
Keywords: photonic sensor; porous silicon; Bragg reflector; microcavity; real-time sensing; in-flow sensing photonic sensor; porous silicon; Bragg reflector; microcavity; real-time sensing; in-flow sensing
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Caroselli, R.; Martín Sánchez, D.; Ponce Alcántara, S.; Prats Quilez, F.; Torrijos Morán, L.; García-Rupérez, J. Real-Time and In-Flow Sensing Using a High Sensitivity Porous Silicon Microcavity-Based Sensor. Sensors 2017, 17, 2813.

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