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Sensors 2017, 17(11), 2672; doi:10.3390/s17112672

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
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Received: 21 September 2017 / Revised: 10 November 2017 / Accepted: 17 November 2017 / Published: 19 November 2017
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
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Abstract

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG. View Full-Text
Keywords: angle generator; angular deflection; angle calibration; flexure hinge; capacitive sensor; Monte Carlo method angle generator; angular deflection; angle calibration; flexure hinge; capacitive sensor; Monte Carlo method
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Tan, X.; Zhu, F.; Wang, C.; Yu, Y.; Shi, J.; Qi, X.; Yuan, F.; Tan, J. Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors. Sensors 2017, 17, 2672.

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