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Sensors 2017, 17(11), 2510; doi:10.3390/s17112510

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing

1
Korea Railroad Research Institute, 176 Cheoldo bangmulgwan-ro, Uiwang 16105, Gyeonggi-do, Korea
2
Division of Energy Environment Technology, University of Science & Technology (UST), Daejeon 34113, Korea
3
NanoINK, Inc., 215 E Hacienda Ave., Campbell, CA 95008, USA
4
School of Mechanical Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Korea
5
Department of Mechanical Engineering, Texas A&M University, College Station, TX 77843, USA
*
Author to whom correspondence should be addressed.
Received: 7 September 2017 / Revised: 23 October 2017 / Accepted: 29 October 2017 / Published: 1 November 2017
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [5254 KB, uploaded 1 November 2017]   |  

Abstract

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers. View Full-Text
Keywords: bending response; bimorph microcantilever; joule-heating; residual stress; thermal expansion coefficient (CTE) bending response; bimorph microcantilever; joule-heating; residual stress; thermal expansion coefficient (CTE)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Kang, S.-W.; Fragala, J.; Kim, S.-H.; Banerjee, D. Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing. Sensors 2017, 17, 2510.

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