Next Article in Journal
Alternative Opportunistic Alert Diffusion to Support Infrastructure Failure during Disasters
Previous Article in Journal
Design of a Wireless Sensor System with the Algorithms of Heart Rate and Agility Index for Athlete Evaluation
Previous Article in Special Issue
Modeling and Compensation of Random Drift of MEMS Gyroscopes Based on Least Squares Support Vector Machine Optimized by Chaotic Particle Swarm Optimization
Article Menu
Issue 10 (October) cover image

Export Article

Open AccessArticle
Sensors 2017, 17(10), 2372; doi:10.3390/s17102372

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

1
School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
2
Singapore-MIT Alliance for Research and Technology (SMART), 1 CREATE Way, Singapore 138602, Singapore
*
Author to whom correspondence should be addressed.
Received: 17 September 2017 / Revised: 13 October 2017 / Accepted: 14 October 2017 / Published: 17 October 2017
(This article belongs to the Special Issue MEMS Resonators)
View Full-Text   |   Download PDF [11555 KB, uploaded 17 October 2017]   |  

Abstract

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μ m at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments. View Full-Text
Keywords: tunable diffraction grating; optical components; microelectromechanical devices tunable diffraction grating; optical components; microelectromechanical devices
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Muttikulangara, S.S.; Baranski, M.; Rehman, S.; Hu, L.; Miao, J. MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications. Sensors 2017, 17, 2372.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top