MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications
AbstractDiffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7
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Muttikulangara, S.S.; Baranski, M.; Rehman, S.; Hu, L.; Miao, J. MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications. Sensors 2017, 17, 2372.
Muttikulangara SS, Baranski M, Rehman S, Hu L, Miao J. MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications. Sensors. 2017; 17(10):2372.Chicago/Turabian Style
Muttikulangara, Sanathanan S.; Baranski, Maciej; Rehman, Shakil; Hu, Liangxing; Miao, Jianmin. 2017. "MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications." Sensors 17, no. 10: 2372.
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