Next Article in Journal
Investigation of a Fiberoptic Device Based on a Long Period Grating in a Ring Resonator
Previous Article in Journal
Design Methodology for Magnetic Field-Based Soft Tri-Axis Tactile Sensors
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(9), 1358; doi:10.3390/s16091358

Interference Confocal Microscope Integrated with Spatial Phase Shifter

1
Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China
2
Department of Engineering Science, University of Oxford, Parks Road, Oxford OX1 3PJ, UK
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 8 June 2016 / Revised: 15 August 2016 / Accepted: 17 August 2016 / Published: 24 August 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3780 KB, uploaded 24 August 2016]   |  

Abstract

We present an interference confocal microscope (ICM) with a new single-body four-step simultaneous phase-shifter device designed to obtain high immunity to vibration. The proposed ICM combines the respective advantages of simultaneous phase shifting interferometry and bipolar differential confocal microscopy to obtain high axis resolution, large dynamic range, and reduce the sensitivity to vibration and reflectance disturbance seamlessly. A compact single body spatial phase shifter is added to capture four phase-shifted interference signals simultaneously without time delay and construct a stable and space-saving simplified interference confocal microscope system. The test result can be obtained by combining the interference phase response and the bipolar property of differential confocal microscopy without phase unwrapping. Experiments prove that the proposed microscope is capable of providing stable measurements with 1 nm of axial depth resolution for either low- or high-numerical aperture objective lenses. View Full-Text
Keywords: confocal microscope; interference; phase shift; spatial phase shifter confocal microscope; interference; phase shift; spatial phase shifter
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Wang, W.; Gu, K.; You, X.; Tan, J.; Liu, J. Interference Confocal Microscope Integrated with Spatial Phase Shifter. Sensors 2016, 16, 1358.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top