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Sensors 2016, 16(8), 1205; doi:10.3390/s16081205

Modeling and Experimental Analysis on the Temperature Response of AlN-Film Based SAWRs

1,2
and
1,2,*
1
Department of Precision Instrument, Tsinghua University, Beijing 100084, China
2
State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 12 June 2016 / Revised: 25 July 2016 / Accepted: 26 July 2016 / Published: 30 July 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [7095 KB, uploaded 30 July 2016]   |  

Abstract

The temperature responses of aluminum nitride (AlN) based surface acoustic wave resonator (SAWR) are modeled and tested. The modeling of the electrical performance is based on a modified equivalent circuit model introduced in this work. For SAWR consisting of piezoelectric film and semiconducting substrate, parasitic parameters from the substrate is taken into consideration for the modeling. By utilizing the modified model, the high temperature electrical performance of the AlN/Si and AlN/6H-SiC based SAWRs can be predicted, indicating that a substrate with a wider band gap will lead to a more stable high temperature behavior, which is further confirmed experimentally by high temperature testing from 300 K to 725 K with SAWRs having a wavelength of 12 μm. Temperature responses of SAWR’s center frequency are also calculated and tested, with experimental temperature coefficient factors (TCF) of center frequency being −29 ppm/K and −26 ppm/K for the AlN/Si and AlN/6H-SiC based SAWRs, which are close to the predicted values. View Full-Text
Keywords: surface acoustic resonators; aluminum nitride; equivalent circuit modeling; high temperature response surface acoustic resonators; aluminum nitride; equivalent circuit modeling; high temperature response
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Chen, S.; You, Z. Modeling and Experimental Analysis on the Temperature Response of AlN-Film Based SAWRs. Sensors 2016, 16, 1205.

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