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Sensors 2016, 16(8), 1185; doi:10.3390/s16081185

Monolithic Cylindrical Fused Silica Resonators with High Q Factors

College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China
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Authors to whom correspondence should be addressed.
Academic Editor: Francesco De Leonardis
Received: 9 May 2016 / Revised: 2 July 2016 / Accepted: 22 July 2016 / Published: 28 July 2016
(This article belongs to the Section Physical Sensors)
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Abstract

The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. In this paper, for the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 105 (ring-down time over 1 min) is reported. The resonator is made of fused silica with low internal friction and high isotropy, with a diameter of 25 mm and a center frequency of 3974.35 Hz. The structure of the resonator is first briefly introduced, and then the experimental non-contact characterization method is presented. In addition, the post-fabrication experimental procedure of Q factor improvement, including chemical and thermal treatment, is demonstrated. The Q factor improvement by both treatments is compared and the primary loss mechanism is analyzed. To the best of our knowledge, the work presented in this paper represents the highest reported Q factor for a cylindrical resonator. The proposed monolithic cylindrical fused silica resonator may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment. View Full-Text
Keywords: cylindrical resonator; fused silica; Q factor; chemical etching; annealing cylindrical resonator; fused silica; Q factor; chemical etching; annealing
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Pan, Y.; Wang, D.; Wang, Y.; Liu, J.; Wu, S.; Qu, T.; Yang, K.; Luo, H. Monolithic Cylindrical Fused Silica Resonators with High Q Factors. Sensors 2016, 16, 1185.

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