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Sensors 2016, 16(6), 830; doi:10.3390/s16060830

A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, China
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Author to whom correspondence should be addressed.
Academic Editor: Stephane Evoy
Received: 11 March 2016 / Revised: 13 May 2016 / Accepted: 2 June 2016 / Published: 6 June 2016
(This article belongs to the Special Issue Resonator Sensors)
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Abstract

Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers were designed based on the simulation results and fabricated using the micro electromechanical systems (MEMS) technology. Finally, the MEMS resonant sensor was packaged with the sensing chip to measure the densities and viscosities of eight different fluids under the flexural and torsional vibrating modes separately. The relative errors of the measured densities from 600 kg/m3 to 900 kg/m3 and viscosities from 200 μPa·s to 1000 μPa·s were calculated and analyzed with different microcantilevers under various vibrating modes. The experimental results showed that the effects of the shape and vibrating mode of micro-cantilever on the measurement accuracies of fluid density and viscosity were analyzed in detail. View Full-Text
Keywords: MEMS resonant sensor; microcantilever; density and viscosity; measuring accuracy; vibrating mode MEMS resonant sensor; microcantilever; density and viscosity; measuring accuracy; vibrating mode
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Zhao, L.; Hu, Y.; Wang, T.; Ding, J.; Liu, X.; Zhao, Y.; Jiang, Z. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes. Sensors 2016, 16, 830.

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