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Sensors 2016, 16(5), 691; doi:10.3390/s16050691

Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation

College of Engineering, ZheJiang Normal University, Jinhua 321004, China
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Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 6 March 2016 / Revised: 7 May 2016 / Accepted: 9 May 2016 / Published: 13 May 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [4695 KB, uploaded 13 May 2016]   |  

Abstract

A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm2, making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection. View Full-Text
Keywords: planar position; capacitive sensor; mono-electrode; hybrid-frequency planar position; capacitive sensor; mono-electrode; hybrid-frequency
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Yu, H.; Zhang, Y.; Shen, M.; Zhang, H.; Gao, Z.; Wang, D. Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation. Sensors 2016, 16, 691.

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