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Sensors 2016, 16(4), 562; doi:10.3390/s16040562

Mass Sensitivity Optimization of a Surface Acoustic Wave Sensor Incorporating a Resonator Configuration

Institute of Acoustics, Chinese Academy of Sciences, No.21, North 4th Ring West Road, Beijing 100190, China
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Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 14 March 2016 / Revised: 14 April 2016 / Accepted: 15 April 2016 / Published: 20 April 2016
(This article belongs to the Section Physical Sensors)
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Abstract

The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave (R-SAW) sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method (FEM) approach was established to extract the coupling-of-modes (COM) parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide (SiO2) deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device. View Full-Text
Keywords: mass sensitivity; Rayleigh surface acoustic wave (R-SAW) resonator; finite element method (FEM); coupling-of-modes (COM); sensitive areas mass sensitivity; Rayleigh surface acoustic wave (R-SAW) resonator; finite element method (FEM); coupling-of-modes (COM); sensitive areas
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Hao, W.; Liu, J.; Liu, M.; Liang, Y.; He, S. Mass Sensitivity Optimization of a Surface Acoustic Wave Sensor Incorporating a Resonator Configuration. Sensors 2016, 16, 562.

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