A Multipurpose CMOS Platform for Nanosensing
AbstractThis paper presents a customizable sensing system based on functionalized nanowires (NWs) assembled onto complementary metal oxide semiconductor (CMOS) technology. The Micro-for-Nano (M4N) chip integrates on top of the electronics an array of aluminum microelectrodes covered with gold by means of a customized electroless plating process. The NW assembly process is driven by an array of on-chip dielectrophoresis (DEP) generators, enabling a custom layout of different nanosensors on the same microelectrode array. The electrical properties of each assembled NW are singularly sensed through an in situ CMOS read-out circuit (ROC) that guarantees a low noise and reliable measurement. The M4N chip is directly connected to an external microcontroller for configuration and data processing. The processed data are then redirected to a workstation for real-time data visualization and storage during sensing experiments. As proof of concept, ZnO nanowires have been integrated onto the M4N chip to validate the approach that enables different kind of sensing experiments. The device has been then irradiated by an external UV source with adjustable power to measure the ZnO sensitivity to UV-light exposure. A maximum variation of about 80% of the ZnO-NW resistance has been detected by the M4N system when the assembled 5
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Bonanno, A.; Sanginario, A.; Marasso, S.L.; Miccoli, B.; Bejtka, K.; Benetto, S.; Demarchi, D. A Multipurpose CMOS Platform for Nanosensing. Sensors 2016, 16, 2034.
Bonanno A, Sanginario A, Marasso SL, Miccoli B, Bejtka K, Benetto S, Demarchi D. A Multipurpose CMOS Platform for Nanosensing. Sensors. 2016; 16(12):2034.Chicago/Turabian Style
Bonanno, Alberto; Sanginario, Alessandro; Marasso, Simone L.; Miccoli, Beatrice; Bejtka, Katarzyna; Benetto, Simone; Demarchi, Danilo. 2016. "A Multipurpose CMOS Platform for Nanosensing." Sensors 16, no. 12: 2034.
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