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Sensors 2016, 16(11), 1729; doi:10.3390/s16111729

Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen

1
Department of Electrical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan
2
Department of Engineering Science, National Cheng Kung University, Tainan 70101, Taiwan
3
Sunonwealth Electric Machine Industry Co. Ltd., Kaohsiung 80673, Taiwan
4
Powerchip Technology Corporation, Hsinchu 30078, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Ye Fang
Received: 1 August 2016 / Accepted: 3 October 2016 / Published: 8 November 2016
(This article belongs to the Section Biosensors)
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Abstract

In the last two decades, various flexural plate-wave (FPW)-based biosensors with low phase velocity, low operation frequency, high sensitivity, and short response time, have been developed. However, conventional FPW transducers have low fabrication yield because controlling the thickness of silicon/isolation/metal/piezoelectric multilayer floating thin-plate is difficult. Additionally, conventional FPW devices usually have high insertion loss because of wave energy dissipation to the silicon substrate or outside area of the output interdigital transducers (IDTs). These two disadvantages hinder the application of FPW devices. To reduce the high insertion loss of FPW devices, we designed two focus-type IDTs (fan-shaped and circular, respectively) that can effectively confine the launched wave energy, and adopted a focus-type silicon-grooved reflective grating structure (RGS) that can reduce the wave propagation loss. To accurately control the thickness of the silicon thin-plate and substantially improve the fabrication yield of FPW transducers, a 60 °C/27 °C two-step anisotropic wet etching process was developed. Compared with conventional FPW devices (with parallel-type IDTs and without RGS), the proposed FPW devices have lower insertion loss (36.04 dB) and higher fabrication yield (63.88%). Furthermore, by using cystamine-based self-assembled monolayer (SAM) nanotechnology, we used the improved FPW device to develop a novel FPW-based carcinoembryonic antigen (CEA) biosensor for detection of colorectal cancer, and this FPW-CEA biosensor has a low detection limit (5 ng/mL), short response time (<10 min), high sensitivity (60.16–70.06 cm2/g), and high sensing linearity (R-square = 0.859–0.980). View Full-Text
Keywords: flexural plate-wave; low insertion loss; high fabrication yield; focus-type interdigital transducers; reflective grating structure; carcinoembryonic antigen biosensor flexural plate-wave; low insertion loss; high fabrication yield; focus-type interdigital transducers; reflective grating structure; carcinoembryonic antigen biosensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Lan, J.-W.; Huang, I.-Y.; Lin, Y.-C.; Lin, C.-Y.; Chen, J.-L.; Hsieh, C.-H. Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen. Sensors 2016, 16, 1729.

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