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Sensors 2016, 16(10), 1611; doi:10.3390/s16101611

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

1
Department of Micro-Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
2
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 21 August 2016 / Revised: 20 September 2016 / Accepted: 26 September 2016 / Published: 29 September 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
View Full-Text   |   Download PDF [4982 KB, uploaded 29 September 2016]   |  

Abstract

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work. View Full-Text
Keywords: Fourier transform spectrometer; microelectromechanical systems (MEMS); electrothermal micromirror; closed-loop control Fourier transform spectrometer; microelectromechanical systems (MEMS); electrothermal micromirror; closed-loop control
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Wang, W.; Chen, J.; Zivkovic, A.S.; Xie, H. A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range. Sensors 2016, 16, 1611.

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