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Sensors 2015, 15(9), 23205-23217; doi:10.3390/s150923205

Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

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Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
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Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China
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Authors to whom correspondence should be addressed.
Academic Editor: Bernhard Tittmann
Received: 16 May 2015 / Revised: 3 July 2015 / Accepted: 8 July 2015 / Published: 15 September 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1901 KB, uploaded 15 September 2015]   |  

Abstract

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20 excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system. View Full-Text
Keywords: CMUT; C-V characteristic curve; sound pressure; bandwidth; ultrasonic imaging CMUT; C-V characteristic curve; sound pressure; bandwidth; ultrasonic imaging
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Song, J.; Xue, C.; He, C.; Zhang, R.; Mu, L.; Cui, J.; Miao, J.; Liu, Y.; Zhang, W. Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications. Sensors 2015, 15, 23205-23217.

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