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Sensors 2015, 15(9), 22660-22671; doi:10.3390/s150922660

High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications

1,2
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1,2
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1
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1,2,* and 1,2,*
1
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
2
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Ha Duong Ngo
Received: 4 July 2015 / Accepted: 31 August 2015 / Published: 8 September 2015
(This article belongs to the Special Issue Sensors for Harsh Environments)
View Full-Text   |   Download PDF [1587 KB, uploaded 8 September 2015]   |  

Abstract

The accurate characterization of the temperature-dependent permittivity of aluminum nitride (AlN) ceramic is quite critical to the application of wireless passive sensors for harsh environments. Since the change of the temperature-dependent permittivity will vary the ceramic-based capacitance, which can be converted into the change of the resonant frequency, an LC resonator, based on AlN ceramic, is prepared by the thick film technology. The dielectric properties of AlN ceramic are measured by the wireless coupling method, and discussed within the temperature range of 12 °C (room temperature) to 600 °C. The results show that the extracted relative permittivity of ceramic at room temperature is 2.3% higher than the nominal value of 9, and increases from 9.21 to 10.79, and the quality factor Q is decreased from 29.77 at room temperature to 3.61 at 600 °C within the temperature range. View Full-Text
Keywords: wireless passive; aluminum nitride ceramic; LC resonator; dielectric properties; high temperature; quality factor wireless passive; aluminum nitride ceramic; LC resonator; dielectric properties; high temperature; quality factor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Liu, J.; Yuan, Y.; Ren, Z.; Tan, Q.; Xiong, J. High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications. Sensors 2015, 15, 22660-22671.

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