Next Article in Journal
NLOS Correction/Exclusion for GNSS Measurement Using RAIM and City Building Models
Next Article in Special Issue
Integrated High Resolution Digital Color Light Sensor in 130 nm CMOS Technology
Previous Article in Journal / Special Issue
Design and Optimization of SiON Ring Resonator-Based Biosensors for Aflatoxin M1 Detection
Article Menu

Export Article

Open AccessArticle
Sensors 2015, 15(7), 17313-17328; doi:10.3390/s150717313

Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array

Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China
*
Author to whom correspondence should be addressed.
Academic Editor: Lorenzo Pavesi
Received: 11 May 2015 / Revised: 6 July 2015 / Accepted: 10 July 2015 / Published: 16 July 2015
(This article belongs to the Special Issue Silicon Based Optical Sensors)
View Full-Text   |   Download PDF [1818 KB, uploaded 16 July 2015]   |  

Abstract

Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors’ output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm−1. For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10−7 RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10−5 RIU can be detected by the SPR sensor array. View Full-Text
Keywords: surface plasmon resonance (SPR); silicon-on-insulator (SOI); biochemical sensor; rib waveguide; finite-difference time-domain (FDTD) method surface plasmon resonance (SPR); silicon-on-insulator (SOI); biochemical sensor; rib waveguide; finite-difference time-domain (FDTD) method
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Yuan, D.; Dong, Y.; Liu, Y.; Li, T. Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array. Sensors 2015, 15, 17313-17328.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top