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Sensors 2015, 15(7), 16929-16955; doi:10.3390/s150716929

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes

Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
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Academic Editor: Stefano Mariani
Received: 18 May 2015 / Revised: 13 June 2015 / Accepted: 17 June 2015 / Published: 13 July 2015
(This article belongs to the Section Physical Sensors)
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Abstract

We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes’ angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs’ dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit. View Full-Text
Keywords: tri-axis gyroscope; gyroscope structure; PSO algorithm; mode matching tri-axis gyroscope; gyroscope structure; PSO algorithm; mode matching
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Xia, D.; Kong, L.; Gao, H. Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes. Sensors 2015, 15, 16929-16955.

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