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Sensors 2015, 15(7), 16729-16739; doi:10.3390/s150716729

A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments

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1
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China
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Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
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State Key Laboratory of Transducer Technology, Department of Precision Instrument and Mechanology, Tsinghua University, Beijing 10084, China
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Authors to whom correspondence should be addressed.
Academic Editor: Ha Duong Ngo
Received: 20 May 2015 / Revised: 3 July 2015 / Accepted: 7 July 2015 / Published: 10 July 2015
(This article belongs to the Special Issue Sensors for Harsh Environments)
View Full-Text   |   Download PDF [1018 KB, uploaded 20 July 2015]   |  

Abstract

In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young’s modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young’s modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure. View Full-Text
Keywords: LC resonant sensor; DuPont 951 ceramic; dielectric constant; Young’s modulus; compensation structure LC resonant sensor; DuPont 951 ceramic; dielectric constant; Young’s modulus; compensation structure
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Qin, L.; Shen, D.; Wei, T.; Tan, Q.; Luo, T.; Zhou, Z.; Xiong, J. A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments. Sensors 2015, 15, 16729-16739.

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