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Sensors 2015, 15(6), 12841-12856; doi:10.3390/s150612841

Longitudinal Modes along Thin Piezoelectric Waveguides for Liquid Sensing Applications

Istituto di Acustica e Sensori O. M. Corbino, IDASC-CNR, Via del Fosso del Cavaliere 100, 00133 Roma, Italy
Academic Editor: Gerhard Lindner
Received: 20 April 2015 / Revised: 26 May 2015 / Accepted: 27 May 2015 / Published: 2 June 2015
(This article belongs to the Special Issue Acoustic Waveguide Sensors)
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Abstract

The propagation of longitudinally polarized acoustic modes along thin piezoelectric plates (BN, ZnO, InN, AlN and GaN) is theoretically studied, aiming at the design of high frequency electroacoustic devices suitable for work in liquid environments. The investigation of the acoustic field profile across the plate revealed the presence of longitudinally polarized Lamb modes, travelling at velocities close to that of the longitudinal bulk acoustic wave propagating in the same direction. Such waves are suitable for the implementation of high-frequency, low-loss electroacoustic devices operating in liquid environments. The time-averaged power flow density, the phase velocity and the electroacoustic coupling coefficient K2 dispersion curves were studied, for the first (S0) and four higher order (S1, S2, S3, S4) symmetrical modes for different electrical boundary conditions. Two electroacoustic coupling configurations were investigated, based on interdigitated transducers, with or without a metal floating electrode at the opposite plate surface. Enhanced performances, such as a K2 as high as 8.5% and a phase velocity as high as 16,700 m/s, were demostrated for the ZnO- and BN-based waveguides, as an example. The relative velocity changes, and the inertial and viscous sensitivities of the first symmetric and anti-symmetric mode, S0 and A0, propagating along thin plates bordered by a viscous liquid were derived using the perturbation approach. The present study highlights the feasibility of the piezoelectric waveguides to the development of high-frequency, integrated-circuits compatible electroacoustic devices suitable for working in liquid environment. View Full-Text
Keywords: BN; AlN; GaN; InN; ZnO; high frequency; liquid environment; coupling configurations; sensors BN; AlN; GaN; InN; ZnO; high frequency; liquid environment; coupling configurations; sensors
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Caliendo, C. Longitudinal Modes along Thin Piezoelectric Waveguides for Liquid Sensing Applications. Sensors 2015, 15, 12841-12856.

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