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Sensors 2015, 15(5), 10146-10165; doi:10.3390/s150510146

A New MEMS Gyroscope Used for Single-Channel Damping

1
School of Computer and Information Management, Inner Mongolia University of Finance and Economics, Hohhot 010070, China
2
Sensing Technique Research Center, Beijing Information Science and Technology University, Beijing 100101, China
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 24 January 2015 / Revised: 21 April 2015 / Accepted: 23 April 2015 / Published: 30 April 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1166 KB, uploaded 30 April 2015]   |  

Abstract

The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure. It is installed on a rotating aircraft, and utilizes the aircraft spin to make its sensing element obtain angular momentum. When the aircraft is subjected to an angular rotation, a periodic Coriolis force is induced in the direction orthogonal to both the angular momentum and the angular velocity input axis. This novel MEMS gyroscope can thus sense angular velocity inputs. The output sensing signal is exactly an amplitude-modulation signal. Its envelope is proportional to the input angular velocity, and the carrier frequency corresponds to the spin frequency of the rotating aircraft, so the MEMS gyroscope can not only sense the transverse angular rotation of an aircraft, but also automatically change the carrier frequency over the change of spin frequency, making it very suitable for the damping of a single-channel control system of a rotating aircraft. In this paper, the motion equation of the MEMS gyroscope has been derived. Then, an analysis has been carried to solve the motion equation and dynamic parameters. Finally, an experimental validation has been done based on a precision three axis rate table. The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively. These results demonstrate that both the design and sensing mechanism are correct. View Full-Text
Keywords: MEMS gyroscope; sensing element; motion equation; steady state solution MEMS gyroscope; sensing element; motion equation; steady state solution
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhang, Z.; Zhang, W.; Zhang, F.; Wang, B. A New MEMS Gyroscope Used for Single-Channel Damping. Sensors 2015, 15, 10146-10165.

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