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Sensors 2015, 15(10), 27359-27373; doi:10.3390/s151027359

A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics

1,2,* , 1,* and 3
1
School of Electronic Science and Technology, Faculty of Electronic Information and Electronic Engineering, Dalian University of Technology, Dalian 116024, China
2
Institute of New Electron Devices, Hangzhou Dianzi University, Hangzhou 310018, China
3
College of Electronic Science & Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 15 September 2015 / Revised: 17 October 2015 / Accepted: 20 October 2015 / Published: 27 October 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1108 KB, uploaded 27 October 2015]   |  

Abstract

This paper presents a fully integrated linear Hall sensor by means of 0.8 μm high voltage complementary metal-oxide semiconductor (CMOS) technology. This monolithic Hall sensor chip features a highly sensitive horizontal switched Hall plate and an efficient signal conditioner using dynamic offset cancellation technique. An improved cross-like Hall plate achieves high magnetic sensitivity and low offset. A new spinning current modulator stabilizes the quiescent output voltage and improves the reliability of the signal conditioner. The tested results show that at the 5 V supply voltage, the maximum Hall output voltage of the monolithic Hall sensor microsystem, is up to ±2.1 V and the linearity of Hall output voltage is higher than 99% in the magnetic flux density range from ±5 mT to ±175 mT. The output equivalent residual offset is 0.48 mT and the static power consumption is 20 mW. View Full-Text
Keywords: monolithic Hall sensor; sensitivity and linearity; Hall offset; dynamic offset cancellation technique monolithic Hall sensor; sensitivity and linearity; Hall offset; dynamic offset cancellation technique
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Huang, H.; Wang, D.; Xu, Y. A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics. Sensors 2015, 15, 27359-27373.

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