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Sensors 2015, 15(1), 672-686; doi:10.3390/s150100672

Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

1
School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China
2
GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore
3
Nanjing Foreign Language School, Nanjing 210008, China
*
Author to whom correspondence should be addressed.
Received: 7 November 2014 / Accepted: 24 December 2014 / Published: 31 December 2014
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [4794 KB, uploaded 31 December 2014]   |  

Abstract

This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account. View Full-Text
Keywords: cross-like Hall plate; sensitivity; offset; P-type covering layer cross-like Hall plate; sensitivity; offset; P-type covering layer
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Lyu, F.; Zhang, Z.; Toh, E.-H.; Liu, X.; Ding, Y.; Pan, Y.; Li, C.; Li, L.; Sha, J.; Pan, H. Performance Comparison of Cross-Like Hall Plates with Different Covering Layers. Sensors 2015, 15, 672-686.

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