Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses
AbstractThis paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today’s state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation.
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Andreou, C.M.; Pahitas, Y.; Georgiou, J. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses. Sensors 2014, 14, 13173-13185.
Andreou CM, Pahitas Y, Georgiou J. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses. Sensors. 2014; 14(7):13173-13185.Chicago/Turabian Style
Andreou, Charalambos M.; Pahitas, Yiannis; Georgiou, Julius. 2014. "Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses." Sensors 14, no. 7: 13173-13185.