Next Article in Journal
A Large Response Range Reflectometric Urea Biosensor Made from Silica-Gel Nanoparticles
Next Article in Special Issue
Examination of a Mechanical Amplifier in the Incudostapedial Joint Gap: FEM Simulation and Physical Model
Previous Article in Journal
Correction: Deng, F., et al. A CMOS Humidity Sensor for Passive RFID Sensing Applications. Sensors 2014, 14, 8728–8739
Previous Article in Special Issue
Parylene C-Based Flexible Electronics for pH Monitoring Applications
Sensors 2014, 14(7), 13173-13185; doi:10.3390/s140713173
Article

Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses

* ,
 and
Department of Electrical and Computer Engineering, University of Cyprus, Nicosia 1678, Cyprus
* Author to whom correspondence should be addressed.
Received: 16 June 2014 / Revised: 1 July 2014 / Accepted: 9 July 2014 / Published: 22 July 2014
(This article belongs to the Special Issue Implantable Sensors)
View Full-Text   |   Download PDF [2281 KB, uploaded 22 July 2014]   |   Browse Figures

Abstract

This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today’s state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation.
Keywords: vestibular prostheses; oscillopsia; inner-ear semi-circular canals; angular-rate sensor; implantable bio-sensors; gyroscope; inertial sensor; motion sensor; MEMS; microfluidics vestibular prostheses; oscillopsia; inner-ear semi-circular canals; angular-rate sensor; implantable bio-sensors; gyroscope; inertial sensor; motion sensor; MEMS; microfluidics
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Export to BibTeX |
EndNote


MDPI and ACS Style

Andreou, C.M.; Pahitas, Y.; Georgiou, J. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses. Sensors 2014, 14, 13173-13185.

View more citation formats

Related Articles

Article Metrics

Comments

Citing Articles

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert