Sensors 2014, 14(7), 13173-13185; doi:10.3390/s140713173
Article

Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses

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Received: 16 June 2014; in revised form: 1 July 2014 / Accepted: 9 July 2014 / Published: 22 July 2014
(This article belongs to the Special Issue Implantable Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This paper presents an alternative approach for angular-rate sensing based on the way that the natural vestibular semicircular canals operate, whereby the inertial mass of a fluid is used to deform a sensing structure upon rotation. The presented gyro has been fabricated in a commercially available MEMS process, which allows for microfluidic channels to be implemented in etched glass layers, which sandwich a bulk-micromachined silicon substrate, containing the sensing structures. Measured results obtained from a proof-of-concept device indicate an angular rate sensitivity of less than 1 °/s, which is similar to that of the natural vestibular system. By avoiding the use of a continually-excited vibrating mass, as is practiced in today’s state-of-the-art gyroscopes, an ultra-low power consumption of 300 μW is obtained, thus making it suitable for implantation.
Keywords: vestibular prostheses; oscillopsia; inner-ear semi-circular canals; angular-rate sensor; implantable bio-sensors; gyroscope; inertial sensor; motion sensor; MEMS; microfluidics
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MDPI and ACS Style

Andreou, C.M.; Pahitas, Y.; Georgiou, J. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses. Sensors 2014, 14, 13173-13185.

AMA Style

Andreou CM, Pahitas Y, Georgiou J. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses. Sensors. 2014; 14(7):13173-13185.

Chicago/Turabian Style

Andreou, Charalambos M.; Pahitas, Yiannis; Georgiou, Julius. 2014. "Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses." Sensors 14, no. 7: 13173-13185.

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