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Sensors 2014, 14(7), 12370-12386; doi:10.3390/s140712370
Article

Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement

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Received: 16 March 2014 / Revised: 18 June 2014 / Accepted: 27 June 2014 / Published: 10 July 2014
(This article belongs to the Section Physical Sensors)
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Abstract

This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductance between the tip array on the front side of the wafer and the electrical contact on the back side, a through-silicon via was created during the wet etching process. The experimental results show that the forces required to detach the barbed microtip arrays from human skin, a polydimethylsiloxane (PDMS) polymer, and a polyvinylchloride (PVC) film were larger compared with those required to detach microtip arrays that lacked barbs. The impedances of the skin-electrode interface were measured and the performance levels of the proposed dry electrode were characterized. Electrode prototypes that employed the proposed tip arrays were implemented. Electroencephalogram (EEG) and electrocardiography (ECG) recordings using these electrode prototypes were also demonstrated.
Keywords: barbed microtips; contact impedance; detaching force; dry electrode; electrocardiography (ECG); electroencephalogram (EEG); silicon wet etching barbed microtips; contact impedance; detaching force; dry electrode; electrocardiography (ECG); electroencephalogram (EEG); silicon wet etching
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Hsu, L.-S.; Tung, S.-W.; Kuo, C.-H.; Yang, Y.-J. Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement. Sensors 2014, 14, 12370-12386.

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