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Sensors 2014, 14(6), 9505-9521; doi:10.3390/s140609505

A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications

1,* , 2
1 DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark 2 Dipartimento di Elettronica e Informazione, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy 3 The MacDiarmid Institute for Advanced Materials and Nanotechnology, Biomolecular Interaction Centre, School of Biological Sciences, University of Canterbury, Private Bag 4800, Christchurch 8140, New Zealand
* Author to whom correspondence should be addressed.
Received: 20 January 2014 / Revised: 15 May 2014 / Accepted: 22 May 2014 / Published: 28 May 2014
(This article belongs to the Special Issue On-Chip Sensors)
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In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.
Keywords: microfabrication; lift-off ears; electrochemical applications; multiple measuring sites microfabrication; lift-off ears; electrochemical applications; multiple measuring sites
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Dimaki, M.; Vergani, M.; Heiskanen, A.; Kwasny, D.; Sasso, L.; Carminati, M.; Gerrard, J.A.; Emneus, J.; Svendsen, W.E. A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications. Sensors 2014, 14, 9505-9521.

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