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Sensors 2014, 14(6), 9505-9521; doi:10.3390/s140609505
Article

A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications

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1 DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark 2 Dipartimento di Elettronica e Informazione, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy 3 The MacDiarmid Institute for Advanced Materials and Nanotechnology, Biomolecular Interaction Centre, School of Biological Sciences, University of Canterbury, Private Bag 4800, Christchurch 8140, New Zealand
* Author to whom correspondence should be addressed.
Received: 20 January 2014 / Revised: 15 May 2014 / Accepted: 22 May 2014 / Published: 28 May 2014
(This article belongs to the Special Issue On-Chip Sensors)
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Abstract

In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.
Keywords: microfabrication; lift-off ears; electrochemical applications; multiple measuring sites microfabrication; lift-off ears; electrochemical applications; multiple measuring sites
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Dimaki, M.; Vergani, M.; Heiskanen, A.; Kwasny, D.; Sasso, L.; Carminati, M.; Gerrard, J.A.; Emneus, J.; Svendsen, W.E. A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications. Sensors 2014, 14, 9505-9521.

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