A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications
AbstractIn this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.
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Dimaki, M.; Vergani, M.; Heiskanen, A.; Kwasny, D.; Sasso, L.; Carminati, M.; Gerrard, J.A.; Emneus, J.; Svendsen, W.E. A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications. Sensors 2014, 14, 9505-9521.
Dimaki M, Vergani M, Heiskanen A, Kwasny D, Sasso L, Carminati M, Gerrard JA, Emneus J, Svendsen WE. A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications. Sensors. 2014; 14(6):9505-9521.Chicago/Turabian Style
Dimaki, Maria; Vergani, Marco; Heiskanen, Arto; Kwasny, Dorota; Sasso, Luigi; Carminati, Marco; Gerrard, Juliet A.; Emneus, Jenny; Svendsen, Winnie E. 2014. "A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications." Sensors 14, no. 6: 9505-9521.