Sensors 2014, 14(5), 8150-8161; doi:10.3390/s140508150
Article

Membrane Thickness Dependence of Nanopore Formation with a Focused Helium Ion Beam

1email, 2email and 1,2,3,* email
Received: 10 March 2014; in revised form: 11 April 2014 / Accepted: 29 April 2014 / Published: 6 May 2014
(This article belongs to the Special Issue Nanopore Sensors: Fabrications, Properties and Applications)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Solid-state nanopores are emerging as a valuable tool for the detection and characterization of individual biomolecules. Central to their success is the realization of fabrication strategies that are both rapid and flexible in their ability to achieve diverse device dimensions. In this paper, we demonstrate the membrane thickness dependence of solid-state nanopore formation with a focused helium ion beam. We vary membrane thickness in situ and show that the rate of pore expansion follows a reproducible trend under all investigated membrane conditions. We show that this trend shifts to lower ion dose for thin membranes in a manner that can be described quantitatively, allowing devices of arbitrary dimension to be realized. Finally, we demonstrate that thin, small-diameter nanopores formed with our approach can be utilized for high signal-to-noise ratio resistive pulse sensing of DNA.
Keywords: solid-state nanopores; ultrathin nanopores; helium ion microscopy; ion milling; DNA translocation
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MDPI and ACS Style

Sawafta, F.; Carlsen, A.T.; Hall, A.R. Membrane Thickness Dependence of Nanopore Formation with a Focused Helium Ion Beam. Sensors 2014, 14, 8150-8161.

AMA Style

Sawafta F, Carlsen AT, Hall AR. Membrane Thickness Dependence of Nanopore Formation with a Focused Helium Ion Beam. Sensors. 2014; 14(5):8150-8161.

Chicago/Turabian Style

Sawafta, Furat; Carlsen, Autumn T.; Hall, Adam R. 2014. "Membrane Thickness Dependence of Nanopore Formation with a Focused Helium Ion Beam." Sensors 14, no. 5: 8150-8161.

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