Sensors 2014, 14(3), 3825-3832; doi:10.3390/s140303825
Article

Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering

1email, 1email, 1email, 2,* email, 1email and 3,* email
Received: 11 December 2013; in revised form: 10 February 2014 / Accepted: 11 February 2014 / Published: 25 February 2014
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H2 sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H2 sintering exhibited a high sensitivity than that without H2 sintering. This result may be due to the resulting increase in the number of Si–OH2+ and Si–O bonds due to the incorporation of H in the gate oxide to reduce the dangling silicon bonds and hence create the surface active sites and the resulting increase in the number of chemical reactions at these surface active sites. Moreover, the LTPS TFT sensor device not only offers low cost and a simple fabrication processes, but the technique also can be extended to integrate the sensor into other systems.
Keywords: low-temperature polycrystalline-silicon (poly-Si); thin-film transistors (TFTs); H2 sintering; pH sensitivity
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MDPI and ACS Style

Yen, L.-C.; Tang, M.-T.; Chang, F.-Y.; Pan, T.-M.; Chao, T.-S.; Lee, C.-H. Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering. Sensors 2014, 14, 3825-3832.

AMA Style

Yen L-C, Tang M-T, Chang F-Y, Pan T-M, Chao T-S, Lee C-H. Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering. Sensors. 2014; 14(3):3825-3832.

Chicago/Turabian Style

Yen, Li-Chen; Tang, Ming-Tsyr; Chang, Fang-Yu; Pan, Tung-Ming; Chao, Tien-Sheng; Lee, Chiang-Hsuan. 2014. "Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering." Sensors 14, no. 3: 3825-3832.

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