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Sensors 2014, 14(2), 3065-3076; doi:10.3390/s140203065

A Wireless and Passive Low-Pressure Sensor

*  and
Carinthian Tech Research (CTR AG), Villach/St. Magdalen 9524, Austria
* Author to whom correspondence should be addressed.
Received: 16 January 2014 / Revised: 27 January 2014 / Accepted: 7 February 2014 / Published: 17 February 2014
(This article belongs to the Section Physical Sensors)
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This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A model is provided to account for the sensor’s behavior. It is then used to show that the response time could be strongly improved using basic design improvements. Further possible improvements are discussed.
Keywords: low pressure sensor; Pirani; wireless; passive; SAW; inductive heating low pressure sensor; Pirani; wireless; passive; SAW; inductive heating
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Nicolay, P.; Lenzhofer, M. A Wireless and Passive Low-Pressure Sensor. Sensors 2014, 14, 3065-3076.

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