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Sensors 2014, 14(2), 3065-3076; doi:10.3390/s140203065
Article

A Wireless and Passive Low-Pressure Sensor

*  and
Received: 16 January 2014; in revised form: 27 January 2014 / Accepted: 7 February 2014 / Published: 17 February 2014
(This article belongs to the Section Physical Sensors)
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Abstract: This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A model is provided to account for the sensor’s behavior. It is then used to show that the response time could be strongly improved using basic design improvements. Further possible improvements are discussed.
Keywords: low pressure sensor; Pirani; wireless; passive; SAW; inductive heating low pressure sensor; Pirani; wireless; passive; SAW; inductive heating
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Nicolay, P.; Lenzhofer, M. A Wireless and Passive Low-Pressure Sensor. Sensors 2014, 14, 3065-3076.

AMA Style

Nicolay P, Lenzhofer M. A Wireless and Passive Low-Pressure Sensor. Sensors. 2014; 14(2):3065-3076.

Chicago/Turabian Style

Nicolay, Pascal; Lenzhofer, Martin. 2014. "A Wireless and Passive Low-Pressure Sensor." Sensors 14, no. 2: 3065-3076.



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