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Influence of Conductivity and Dielectric Constant of Water–Dioxane Mixtures on the Electrical Response of SiNW-Based FETs
Chemical Engineering, Delft University of Technology, 2628 BL Delft, The Netherlands
Philips Research Laboratories, 5656 AE Eindhoven, The Netherlands
Materials innovation institute M2i, 2628 CD Delft, The Netherlands
* Author to whom correspondence should be addressed.
Received: 26 September 2013; in revised form: 22 January 2014 / Accepted: 24 January 2014 / Published: 29 January 2014
Abstract: In this study, we report on the electrical response of top-down, p-type silicon nanowire field-effect transistors exposed to water and mixtures of water and dioxane. First, the capacitive coupling of the back gate and the liquid gate via an Ag/AgCl electrode were compared in water. It was found that for liquid gating smaller potentials are needed to obtain similar responses of the nanowire compared to back gating. In the case of back gating, the applied potential couples through the buried oxide layer, indicating that the associated capacitance dominates all other capacitances involved during this mode of operation. Next, the devices were exposed to mixtures of water and dioxane to study the effect of these mixtures on the device characteristics, including the threshold voltage (VT). The VT dependency on the mixture composition was found to be related to the decreased dissociation of the surface silanol groups and the conductivity of the mixture used. This latter was confirmed by experiments with constant conductivity and varying water–dioxane mixtures.
Keywords: silicon nanowire; field-effect transistor; liquid gate; back gate; conductivity
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Cite This Article
MDPI and ACS Style
Mescher, M.; Brinkman, A.G.; Bosma, D.; Klootwijk, J.H.; Sudhölter, E.J.; de Smet, L.C. Influence of Conductivity and Dielectric Constant of Water–Dioxane Mixtures on the Electrical Response of SiNW-Based FETs. Sensors 2014, 14, 2350-2361.
Mescher M, Brinkman AG, Bosma D, Klootwijk JH, Sudhölter EJ, de Smet LC. Influence of Conductivity and Dielectric Constant of Water–Dioxane Mixtures on the Electrical Response of SiNW-Based FETs. Sensors. 2014; 14(2):2350-2361.
Mescher, Marleen; Brinkman, Aldo G.; Bosma, Duco; Klootwijk, Johan H.; Sudhölter, Ernst J.; de Smet, Louis C. 2014. "Influence of Conductivity and Dielectric Constant of Water–Dioxane Mixtures on the Electrical Response of SiNW-Based FETs." Sensors 14, no. 2: 2350-2361.