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Sensors 2014, 14(12), 22785-22797; doi:10.3390/s141222785

GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection

1,†
,
1,2,†
and
1,†,*
1
FEMTO-ST Institute, Université de Franche-Comté, 15B avenue des Montboucons, 25030 Besançon Cedex, France
2
Institute for Interdisciplinary Innovations in Technology (3IT), Faculty of Engineering, Université de Sherbrooke, 3000 Boulevard de l'Université, Sherbrooke, QC J1K OA5, Canada
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Received: 15 October 2014 / Revised: 17 November 2014 / Accepted: 25 November 2014 / Published: 2 December 2014
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Abstract

This work demonstrates the improvement of mass detection sensitivity and time response using a simple sensor structure. Indeed, complicated technological processes leading to very brittle sensing structures are often required to reach high sensitivity when we want to detect specific molecules in biological fields. These developments constitute an obstacle to the early diagnosis of diseases. An alternative is the design of coupled structures. In this study, the device is based on the piezoelectric excitation and detection of two GaAs microstructures vibrating in antisymmetric modes. GaAs is a crystal which has the advantage to be micromachined easily using typical clean room processes. Moreover, we showed its high potential in direct biofunctionalisation for use in the biological field. A specific design of the device was performed to improve the detection at low mass and an original detection method has been developed. The principle is to exploit the variation in amplitude at the initial resonance frequency which has in the vicinity of weak added mass the greatest slope. Therefore, we get a very good resolution for an infinitely weak mass: relative voltage variation of 8%/1 fg. The analysis is based on results obtained by finite element simulation. View Full-Text
Keywords: GaAs piezoelectric transducer; microcantilever; acoustic coupling; ultra-sensitivity; finite element method; biological sensing GaAs piezoelectric transducer; microcantilever; acoustic coupling; ultra-sensitivity; finite element method; biological sensing
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Chopard, T.; Lacour, V.; Leblois, T. GaAs Coupled Micro Resonators with Enhanced Sensitive Mass Detection. Sensors 2014, 14, 22785-22797.

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