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Sensors 2014, 14(12), 22180-22198; doi:10.3390/s141222180

Multi-Frequency Band Pyroelectric Sensors

Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan
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Received: 23 September 2014 / Revised: 6 November 2014 / Accepted: 20 November 2014 / Published: 25 November 2014
(This article belongs to the Special Issue Frontiers in Infrared Photodetection)
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Abstract

A methodology is proposed for designing a multi-frequency band pyroelectric sensor which can detect subjects with various frequencies or velocities. A structure with dual pyroelectric layers, consisting of a thinner sputtered ZnO layer and a thicker aerosol ZnO layer, proved helpful in the development of the proposed sensor. The thinner sputtered ZnO layer with a small thermal capacity and a rapid response accomplishes a high-frequency sensing task, while the thicker aerosol ZnO layer with a large thermal capacity and a tardy response is responsible for low-frequency sensing tasks. A multi-frequency band pyroelectric sensor is successfully designed, analyzed and fabricated in the present study. The range of the multi-frequency sensing can be estimated by means of the proposed design and analysis to match the thicknesses of the sputtered and the aerosol ZnO layers. The fabricated multi-frequency band pyroelectric sensor with a 1 μm thick sputtered ZnO layer and a 20 μm thick aerosol ZnO layer can sense a frequency band from 4000 to 40,000 Hz without tardy response and low voltage responsivity. View Full-Text
Keywords: pyroelectricity; sensor; multi-frequency; zinc oxide; thin film pyroelectricity; sensor; multi-frequency; zinc oxide; thin film
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Hsiao, C.-C.; Liu, S.-Y. Multi-Frequency Band Pyroelectric Sensors. Sensors 2014, 14, 22180-22198.

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