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Sensors 2014, 14(11), 20667-20686; doi:10.3390/s141120667

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

1
Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China
2
Institut d'Electronique, de Microélectronique et de Nanotechnologie—IEMN CNRS UMR8520, NAM6 group, Villeneuve d'Ascq 59650, France
Expanded conference paper based on “5.4 MHz Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection” 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
Bernard Legrand is now with LAAS CNRS UPR8001, NBS group, Toulouse 31031, France.
*
Author to whom correspondence should be addressed.
Received: 18 August 2014 / Revised: 13 October 2014 / Accepted: 14 October 2014 / Published: 31 October 2014
(This article belongs to the Section Physical Sensors)
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Abstract

In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5 μm in thickness was enabled to feature MHz resonance frequencies with integrated thermal actuation and piezoresistive detection. Standard silicon micromachining was employed. Both electrical and optical measurements were carried out in air. The resonance frequency and the quality factor of the novel probe were measured to be 5.4 MHz and 4000 respectively, which are much higher than those (about several hundreds of kHz) of commonly used cantilever probes. The probe was mounted onto a commercial AFM set-up through a dedicated probe-holder and circuit board. Topographic images of patterned resist samples were obtained. It is expected that the resonance frequency and the measurement bandwidth of such probes will be further increased by a proper downscaling, thus leading to a significant increase in the scanning speed capability of AFM instruments. View Full-Text
Keywords: AFM; Micromechanical resonator; thermal actuation; piezoresistive detection AFM; Micromechanical resonator; thermal actuation; piezoresistive detection
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Xiong, Z.; Mairiaux, E.; Walter, B.; Faucher, M.; Buchaillot, L.; Legrand, B. A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection. Sensors 2014, 14, 20667-20686.

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