Next Article in Journal
An Energy Efficient Compressed Sensing Framework for the Compression of Electroencephalogram Signals
Previous Article in Journal
Gearbox Tooth Cut Fault Diagnostics Using Acoustic Emission and Vibration Sensors — A Comparative Study
Sensors 2014, 14(1), 1394-1473; doi:10.3390/s140101394
Review

The Development of Micromachined Gyroscope Structure and Circuitry Technology

* ,
 and
Key Laboratory for Micro-inertial Instruments and Advanced Navigation Technology of the Education Ministry, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
* Author to whom correspondence should be addressed.
Received: 27 October 2013 / Revised: 28 November 2013 / Accepted: 11 December 2013 / Published: 14 January 2014
(This article belongs to the Section Physical Sensors)

Abstract

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.
Keywords: micromachined/micro gyroscopes; gyroscope structure; gyroscope circuitry; Coriolis effect; Sagnac effect; gyroscope review micromachined/micro gyroscopes; gyroscope structure; gyroscope circuitry; Coriolis effect; Sagnac effect; gyroscope review
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Export to BibTeX |
EndNote


MDPI and ACS Style

Xia, D.; Yu, C.; Kong, L. The Development of Micromachined Gyroscope Structure and Circuitry Technology. Sensors 2014, 14, 1394-1473.

View more citation formats

Related Articles

Article Metrics

Comments

Citing Articles

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert