Sensors 2014, 14(1), 1394-1473; doi:10.3390/s140101394
Review

The Development of Micromachined Gyroscope Structure and Circuitry Technology

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Received: 27 October 2013; in revised form: 28 November 2013 / Accepted: 11 December 2013 / Published: 14 January 2014
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.
Keywords: micromachined/micro gyroscopes; gyroscope structure; gyroscope circuitry; Coriolis effect; Sagnac effect; gyroscope review
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MDPI and ACS Style

Xia, D.; Yu, C.; Kong, L. The Development of Micromachined Gyroscope Structure and Circuitry Technology. Sensors 2014, 14, 1394-1473.

AMA Style

Xia D, Yu C, Kong L. The Development of Micromachined Gyroscope Structure and Circuitry Technology. Sensors. 2014; 14(1):1394-1473.

Chicago/Turabian Style

Xia, Dunzhu; Yu, Cheng; Kong, Lun. 2014. "The Development of Micromachined Gyroscope Structure and Circuitry Technology." Sensors 14, no. 1: 1394-1473.

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