Sensors 2014, 14(1), 117-128; doi:10.3390/s140100117
Article

Development of a Multi-Channel Piezoelectric Acoustic Sensor Based on an Artificial Basilar Membrane

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Received: 11 November 2013; in revised form: 10 December 2013 / Accepted: 17 December 2013 / Published: 20 December 2013
(This article belongs to the Special Issue Polymeric Micro Sensors and Actuators)
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Abstract: In this research, we have developed a multi-channel piezoelectric acoustic sensor (McPAS) that mimics the function of the natural basilar membrane capable of separating incoming acoustic signals mechanically by their frequency and generating corresponding electrical signals. The McPAS operates without an external energy source and signal processing unit with a vibrating piezoelectric thin film membrane. The shape of the vibrating membrane was chosen to be trapezoidal such that different locations of membrane have different local resonance frequencies. The length of the membrane is 28 mm and the width of the membrane varies from 1 mm to 8 mm. Multiphysics finite element analysis (FEA) was carried out to predict and design the mechanical behaviors and piezoelectric response of the McPAS model. The designed McPAS was fabricated with a MEMS fabrication process based on the simulated results. The fabricated device was tested with a mouth simulator to measure its mechanical and piezoelectrical frequency response with a laser Doppler vibrometer and acoustic signal analyzer. The experimental results show that the as fabricated McPAS can successfully separate incoming acoustic signals within the 2.5 kHz–13.5 kHz range and the maximum electrical signal output upon acoustic signal input of 94 dBSPL was 6.33 mVpp. The performance of the fabricated McPAS coincided well with the designed parameters.
Keywords: cochlea; piezoelectric; microelectromechanical system (MEMS); artificial basilar membrane (ABM); laser Doppler vibrometer (LDV)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Jung, Y.; Kwak, J.-H.; Lee, Y.H.; Kim, W.D.; Hur, S. Development of a Multi-Channel Piezoelectric Acoustic Sensor Based on an Artificial Basilar Membrane. Sensors 2014, 14, 117-128.

AMA Style

Jung Y, Kwak J-H, Lee YH, Kim WD, Hur S. Development of a Multi-Channel Piezoelectric Acoustic Sensor Based on an Artificial Basilar Membrane. Sensors. 2014; 14(1):117-128.

Chicago/Turabian Style

Jung, Youngdo; Kwak, Jun-Hyuk; Lee, Young H.; Kim, Wan D.; Hur, Shin. 2014. "Development of a Multi-Channel Piezoelectric Acoustic Sensor Based on an Artificial Basilar Membrane." Sensors 14, no. 1: 117-128.


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