Next Article in Journal
Cognitive Radio Wireless Sensor Networks: Applications, Challenges and Research Trends
Next Article in Special Issue
Polycarbonate as an Elasto-Plastic Material Model for Simulation of the Microstructure Hot Imprint Process
Previous Article in Journal
High Resolution Direction of Arrival (DOA) Estimation Based on Improved Orthogonal Matching Pursuit (OMP) Algorithm by Iterative Local Searching
Previous Article in Special Issue
Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft
Article Menu

Export Article

Open AccessArticle
Sensors 2013, 13(9), 11184-11195; doi:10.3390/s130911184

Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Institute for Hi-Tech Development, Faculty of Mechanical Engineering and Mechatronics, Kaunas University of Technology, Studentu 65-209, Kaunas LT-51369, Lithuania
Author to whom correspondence should be addressed.
Received: 19 July 2013 / Revised: 12 August 2013 / Accepted: 16 August 2013 / Published: 22 August 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
View Full-Text   |   Download PDF [1044 KB, uploaded 21 June 2014]   |  


Due to their small size, low weight, low cost and low energy consumption, MEMS accelerometers have achieved great commercial success in recent decades. The aim of this research work is to identify a MEMS accelerometer structure for human body dynamics measurements. Photogrammetry was used in order to measure possible maximum accelerations of human body parts and the bandwidth of the digital acceleration signal. As the primary structure the capacitive accelerometer configuration is chosen in such a way that sensing part measures on all three axes as it is 3D accelerometer and sensitivity on each axis is equal. Hill climbing optimization was used to find the structure parameters. Proof-mass displacements were simulated for all the acceleration range that was given by the optimization problem constraints. The final model was constructed in Comsol Multiphysics. Eigenfrequencies were calculated and model’s response was found, when vibration stand displacement data was fed into the model as the base excitation law. Model output comparison with experimental data was conducted for all excitation frequencies used during the experiments.
Keywords: capacitive; accelerometer; MEMS; optimization; proof-mass; L-shaped beam capacitive; accelerometer; MEMS; optimization; proof-mass; L-shaped beam
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Benevicius, V.; Ostasevicius, V.; Gaidys, R. Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements. Sensors 2013, 13, 11184-11195.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top