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Sensors 2013, 13(6), 6910-6935; doi:10.3390/s130606910

Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing

1,2,* , 1,2
Received: 23 March 2013 / Revised: 13 May 2013 / Accepted: 14 May 2013 / Published: 24 May 2013
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)


Langasite surface acoustic wave devices can be used to implement harsh-environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.
Keywords: surface acoustic wave; gas sensor; oxygen; langasite; zinc oxide; tin oxide surface acoustic wave; gas sensor; oxygen; langasite; zinc oxide; tin oxide
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Greve, D.W.; Chin, T.-L.; Zheng, P.; Ohodnicki, P.; Baltrus, J.; Oppenheim, I.J. Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing. Sensors 2013, 13, 6910-6935.

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