Sensors 2013, 13(4), 4640-4658; doi:10.3390/s130404640
Review

Toward One Giga Frames per Second — Evolution of in Situ Storage Image Sensors

Received: 19 February 2013; in revised form: 19 March 2013 / Accepted: 26 March 2013 / Published: 8 April 2013
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Japan 2012)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The ISIS is an ultra-fast image sensor with in-pixel storage. The evolution of the ISIS in the past and in the near future is reviewed and forecasted. To cover the storage area with a light shield, the conventional frontside illuminated ISIS has a limited fill factor. To achieve higher sensitivity, a BSI ISIS was developed. To avoid direct intrusion of light and migration of signal electrons to the storage area on the frontside, a cross-sectional sensor structure with thick pnpn layers was developed, and named “Tetratified structure”. By folding and looping in-pixel storage CCDs, an image signal accumulation sensor, ISAS, is proposed. The ISAS has a new function, the in-pixel signal accumulation, in addition to the ultra-high-speed imaging. To achieve much higher frame rate, a multi-collection-gate (MCG) BSI image sensor architecture is proposed. The photoreceptive area forms a honeycomb-like shape. Performance of a hexagonal CCD-type MCG BSI sensor is examined by simulations. The highest frame rate is theoretically more than 1Gfps. For the near future, a stacked hybrid CCD/CMOS MCG image sensor seems most promising. The associated problems are discussed. A fine TSV process is the key technology to realize the structure.
Keywords: imaging device; high-speed; image sensor; BSI; ISIS; ISAS
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MDPI and ACS Style

Etoh, T.G.; Son, D.V.T.; Yamada, T.; Charbon, E. Toward One Giga Frames per Second — Evolution of in Situ Storage Image Sensors. Sensors 2013, 13, 4640-4658.

AMA Style

Etoh TG, Son DVT, Yamada T, Charbon E. Toward One Giga Frames per Second — Evolution of in Situ Storage Image Sensors. Sensors. 2013; 13(4):4640-4658.

Chicago/Turabian Style

Etoh, Takeharu G.; Son, Dao V.T.; Yamada, Tetsuo; Charbon, Edoardo. 2013. "Toward One Giga Frames per Second — Evolution of in Situ Storage Image Sensors." Sensors 13, no. 4: 4640-4658.

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