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Sensors 2013, 13(3), 3664-3674; doi:10.3390/s130303664
Article

A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process

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Received: 19 December 2012; in revised form: 19 February 2013 / Accepted: 13 March 2013 / Published: 15 March 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
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Abstract: The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm.
Keywords: integrtaed ammonia microsensor; zirconium dioxide; readout circuit; CMOS integrtaed ammonia microsensor; zirconium dioxide; readout circuit; CMOS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Lin, G.-M.; Dai, C.-L.; Yang, M.-Z. A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process. Sensors 2013, 13, 3664-3674.

AMA Style

Lin G-M, Dai C-L, Yang M-Z. A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process. Sensors. 2013; 13(3):3664-3674.

Chicago/Turabian Style

Lin, Guan-Ming; Dai, Ching-Liang; Yang, Ming-Zhi. 2013. "A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process." Sensors 13, no. 3: 3664-3674.



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