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Sensors 2013, 13(3), 3568-3587; doi:10.3390/s130303568
Article

A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope

 and
*
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
* Author to whom correspondence should be addressed.
Received: 26 February 2013 / Revised: 8 March 2013 / Accepted: 11 March 2013 / Published: 14 March 2013
(This article belongs to the Section Physical Sensors)

Abstract

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.
Keywords: out-of-plane gyroscope; parasitic-insensitive switched-capacitor (PISC); ΣΔ ADC out-of-plane gyroscope; parasitic-insensitive switched-capacitor (PISC); ΣΔ ADC
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Chang, M.-H.; Huang, H.-P. A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope. Sensors 2013, 13, 3568-3587.

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