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Sensors 2013, 13(3), 3568-3587; doi:10.3390/s130303568
Article

A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope

 and
*
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
* Author to whom correspondence should be addressed.
Received: 26 February 2013 / Revised: 8 March 2013 / Accepted: 11 March 2013 / Published: 14 March 2013
(This article belongs to the Section Physical Sensors)

Abstract

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.
Keywords: out-of-plane gyroscope; parasitic-insensitive switched-capacitor (PISC); ΣΔ ADC out-of-plane gyroscope; parasitic-insensitive switched-capacitor (PISC); ΣΔ ADC
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Chang, M.-H.; Huang, H.-P. A Novel Offset Cancellation Based on Parasitic-Insensitive Switched-Capacitor Sensing Circuit for the Out-of-Plane Single-Gimbaled Decoupled CMOS-MEMS Gyroscope. Sensors 2013, 13, 3568-3587.

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