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• Hrabina, J
• Lazar, J
• Holá, M
• Číp, O
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• Lazar, J
• Holá, M
• Číp, O
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• Lazar, J
• Holá, M
• Číp, O

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Sensors 2013, 13(2), 2206-2219; doi:10.3390/s130202206

Article

Frequency Noise Properties of Lasers for Interferometry in Nanometrology

Jan Hrabina* , Josef Lazar, Miroslava Holá and Ondřej Číp

Institute of Scientific Instruments, v.v.i., Academy of Sciences of the Czech Republic, Královopolská 147, Brno 61264, Czech Republic

* Author to whom correspondence should be addressed.

Received: 26 November 2012; in revised form: 31 January 2013 / Accepted: 4 February 2013 / Published: 7 February 2013

(This article belongs to the Special Issue Laser Sensing and Imaging)

Download PDF Full-Text [886 KB, uploaded 7 February 2013 13:59 CET]

Abstract: In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.

Keywords: nanometrology; laser noise; interferometry; nanopositioning; AFM

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