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Sensors 2013, 13(2), 2206-2219; doi:10.3390/s130202206
Article

Frequency Noise Properties of Lasers for Interferometry in Nanometrology

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Received: 26 November 2012 / Revised: 31 January 2013 / Accepted: 4 February 2013 / Published: 7 February 2013
(This article belongs to the Special Issue Laser Sensing and Imaging)
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Abstract

In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
Keywords: nanometrology; laser noise; interferometry; nanopositioning; AFM nanometrology; laser noise; interferometry; nanopositioning; AFM
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Hrabina, J.; Lazar, J.; Holá, M.; Číp, O. Frequency Noise Properties of Lasers for Interferometry in Nanometrology. Sensors 2013, 13, 2206-2219.

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